Analysis and Design Principles of MEMS Devices by Minhang Bao

By Minhang Bao

Sensors and actuators at the moment are a part of our lifestyle and seem in lots of home equipment, corresponding to autos, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro structures inclusive of micro mechanical sensors, actuators and micro digital circuits. quite a few MEMS units were built and lots of mass produced, however the info on those is generally dispersed within the literature. This e-book provides the research and layout rules of MEMS units. the data is entire, targeting microdynamics, comparable to the mechanics of beam and diaphragm constructions, air damping and its impression at the movement of mechanical constructions. utilizing sensible examples, the writer examines difficulties linked to research and layout, and options are integrated in the back of the publication. definitely the right complicated point textbook for graduates, Analysis and layout rules of MEMS Devices is an appropriate resource of reference for researchers and engineers within the box.

* offers the research and layout ideas of MEMS units extra systematically than ever before.

* comprises the theories crucial for the research and layout of MEMS contains the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the ebook.

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W. Chapman, D. Long, Silicon diffused-element piezoresistive diaphragms, Journal of Applied Physics, Vol. 33 (1962) 3322-3327 [6] A. C. M. J. Somers, Miniature pressure transducers with a silicon diaphragm, Philips Tech. , Vol. l (1973) 14-20 [7] Samaun, K. D. Wise, J. B. Angell, An IC piezoresistive pressure sensor for biomedical instrumentation, IEEE Trans, on Biomedical Engineering, Vol. BME-20 (1973) 101-109 [8] W. Ko, J. Hynecek, S. F. Boettcher, Development of a miniature pressure transducer for biomedical applications, IEEE Trans, on Electron Devices, Vol.

Micro Mechanical Electric Switch Electric switches (or relays) are very important devices in communication and control systems. For example, electric switches are widely used in microwave and millimeter wave integrated circuits (MMICs) for telecommunication applications including signal routing, impedance matching networks, adjustable gain amplifiers and so forth. The state-of-the-art technology uses solid-state switches such as GaAs MESFETs and PFN diodes. However, these solid-state switches have a large insertion loss in the "on" state, and a poor electrical isolation in the "off state when the signal frequency is in GHz level.

LpF. The variation of the capacitance is about 3fF for a full operation range of 50g. To detect such a small change in capacitance, a carefully designed signal detection circuit is monolithically integrated with the mechanical sensor. The equivalent circuitry is shown in Fig. 2, where the mechanical capacitive sensor is schematically shown in the dotted block. ) and a feedback resistance of 3MQ. Thus, the accelerometer works in a force-balanced mode. As a result, the sensitivity at the output is about 20 mV/g for an operation range of 0 to 50g.

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